Diffusion furnace for semiconductor and solar applications

HengTong diffusion furnaces and horizontal tube furnaces are special for semiconductor and solar applications. Diffusion Furnaces are a 'plug and heat' solution for the production of high-quality crystalline silicon wafers for solar cells and semiconductors. The diffusion cassettes are of low mass design type with vertical or horizontal elements for operating temperatures up to 1350°C.

Referred to as the most reliable horizontal tube furnaces in the industry, Bruce Technologies offers models of horizontal furnaces for 100 – 300mm wafers. To further enhance the capabilities of the furnaces, Bruce Technologies offers an array of system options including semi-automated and fully automated loading systems for total system flexibility.

STA offers a variety of diffusion furnaces upgrades that are specifically designed to maximize performance and minimize cost-of-ownership. With over 30 years of OEM experience, Bruce remains your first choice for all types of diffusion furnace equipment upgrades. We are committed to supporting our existing installation base of equipment and customers with new and refurbished horizontal diffusion furnaces. We also supply (1) the buyers, resellers, and refurb-houses that deal in used STA Diffusion Furnace and any horizontal furnace OEMs with our Atmoscan and Automation products. The list below represents a sample of available retrofits. For additional details, please contact your Bruce Technologies representative.

Process conversions of diffusion furnaces

Thermal control enhancements

Boatloader & wafer loading upgrades

Control system conversions

Gas distribution modifications

Furnace automation solutions

Replacement heating elements