ZHENGZHOU HENGTONG FURNACE CO,. LTD
Automated Ultrasonic Spin-Spray Coater (0-3000 rpm, 12" Wafer Max) w/ Heater & Fume Hood
Automated Ultrasonic Spin-Spray Coater (0-3000 rpm, 12
  • Automated Ultrasonic Spin-Spray Coater (0-3000 rpm, 12
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The Automated Ultrasonic Spin-Spray Coater integrates ultrasonic atomization, precision spin coating, and in-situ drying into one compact system, designed for high-uniformity thin film preparation on substrates up to 12" (300mm) in diameter. Ideal for both R&D laboratories and industrial production lines, this equipment combines the advantages of spin coating (dense film formation) and ultrasonic spraying (uniform coverage) to deliver consistent results across diverse materials and applications .

 

Key Features & Advantages

 

ü Dual-Technology Synergy: Ultrasonic atomization (up to 50kHz) generates micro-droplets (10-20μm) for fine coating, while programmable spin speed (300-3000 rpm) ensures film density. Switch between spin-only, spray-only, or combined modes for flexible process control .

ü Exceptional Uniformity: Swing arm (1°-20°/s adjustable speed) with dual nozzles (20mm narrow/40mm wide spray) ensures full substrate coverage. Coating thickness variation ≤±5% for consistent product quality .

ü Precision Control System: Touchscreen panel regulates ultrasonic power, spray rate (0.6pl-4ml/min), spin speed, and heating temperature (RT-80°C). Heatable syringe pump (up to 75°C) accommodates 1-50 mPa·s viscosity fluids .

ü Integrated Safety & Efficiency: Built-in fume hood with 4" venting port and LED lighting ensures safe operation. Inline IR heater enables instant post-coating drying, reducing process time by 30% vs. traditional methods .

ü Scalable Configuration: Optional 2-4 ultrasonic heads for layer-by-layer coating; multi-channel syringe pump available for complex material deposition .

 

Parameter

Details

Substrate Capacity

Up to 12" (300mm) diameter / 8" square

Spin Speed

300-3000 rpm (programmable)

Ultrasonic Generator

50kHz, 100W with 2 spray nozzles (Kf-25 adapters)

Fluid Compatibility

1-50 mPa·s viscosity; ≤10% solid content suspension

Syringe Pump

0.4-30mm syringe diameter;

0.01-0.99mm/min pumping rate

Heating System

IR heater (up to 80°C);

heatable syringe pump (up to 75°C)

Power Supply

208-240VAC, 50/60Hz, 1800W (single-phase)

Safety Features

Oil-less vacuum chuck, built-in fume hood, overheat protection


Application:

New Energy: Perovskite solar cells, lithium battery electrodes, energy storage components

Electronics: Semiconductor wafers, flexible electronics, optoelectronic devices .• Advanced Materials: Polymer composites, functional coatings, patterned/uneven substrate coating .

Biomedical & Industrial: Drug delivery systems, corrosion-resistant coatings, aerospace components .

 

The Automated Ultrasonic Spin-Spray Coater integrates ultrasonic atomization, precision spin coating, and in-situ drying into one compact system, designed for high-uniformity thin film preparation on substrates up to 12" (300mm) in diameter. Ideal for both R&D laboratories and industrial production lines, this equipment combines the advantages of spin coating (dense film formation) and ultrasonic spraying (uniform coverage) to deliver consistent results across diverse materials and applications .

 

Key Features & Advantages

 

ü Dual-Technology Synergy: Ultrasonic atomization (up to 50kHz) generates micro-droplets (10-20μm) for fine coating, while programmable spin speed (300-3000 rpm) ensures film density. Switch between spin-only, spray-only, or combined modes for flexible process control .

ü Exceptional Uniformity: Swing arm (1°-20°/s adjustable speed) with dual nozzles (20mm narrow/40mm wide spray) ensures full substrate coverage. Coating thickness variation ≤±5% for consistent product quality .

ü Precision Control System: Touchscreen panel regulates ultrasonic power, spray rate (0.6pl-4ml/min), spin speed, and heating temperature (RT-80°C). Heatable syringe pump (up to 75°C) accommodates 1-50 mPa·s viscosity fluids .

ü Integrated Safety & Efficiency: Built-in fume hood with 4" venting port and LED lighting ensures safe operation. Inline IR heater enables instant post-coating drying, reducing process time by 30% vs. traditional methods .

ü Scalable Configuration: Optional 2-4 ultrasonic heads for layer-by-layer coating; multi-channel syringe pump available for complex material deposition .

 

Parameter

Details

Substrate Capacity

Up to 12" (300mm) diameter / 8" square

Spin Speed

300-3000 rpm (programmable)

Ultrasonic Generator

50kHz, 100W with 2 spray nozzles (Kf-25 adapters)

Fluid Compatibility

1-50 mPa·s viscosity; ≤10% solid content suspension

Syringe Pump

0.4-30mm syringe diameter;

0.01-0.99mm/min pumping rate

Heating System

IR heater (up to 80°C);

heatable syringe pump (up to 75°C)

Power Supply

208-240VAC, 50/60Hz, 1800W (single-phase)

Safety Features

Oil-less vacuum chuck, built-in fume hood, overheat protection


Application:

New Energy: Perovskite solar cells, lithium battery electrodes, energy storage components

Electronics: Semiconductor wafers, flexible electronics, optoelectronic devices .• Advanced Materials: Polymer composites, functional coatings, patterned/uneven substrate coating .

Biomedical & Industrial: Drug delivery systems, corrosion-resistant coatings, aerospace components .