HTTF-1700-HVC CVD tube furnace is a diameter 60mm single-zone alumina tube furnace with a high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.
CVD Chemical Vapor Deposition furnace is a process which allows the creation of a deposit on the surface of mechanical parts, to protect them from oxidation and corrosion.
HTTF-1700 series tube furnace | Casing | Double-layer steel casing with air cooling. |
Processing Tube W Thermal Block Placement | Material: High Purity Alumina | |
Power | AC 208-240V Single phase, 50/60Hz | |
Heating Element | 8 pcs 1800°C grade MoSi2 heating element | |
Working Temp. | Max. Heating Temp.: 1650°C | |
Heat-up Rate | <=5°C/min | |
Heating Zone Length | Heating zone length: 457 mm (18") | |
Temp. Control | PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller. | |
Vacuum Seal | One pair of stainless steel vacuum flange with: | |
Dimension | 550 x 380 x 520 | |
High Vacuum Station | Power | 100~110W |
Rated Voltage | AC 208-240V Single Phase, 50/60Hz | |
Dimension | 600(L) x 600(W) x 700(H), mm | |
Structure | Mobile cart size: 600 (L) x 600 (W) x 700(H), mm A vacuum sensor is not included | |
Control Panel | One button operation - the diaphragm pump and the turbopump will start after pressing "start" button. System-controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber. Self-protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum. LCD screen - double lines parameters checking interface make the working easier to be handled. | |
Volume Flow Rate | Nitrogen N2 33 L/s | |
Working Range | From 1000 mbar to <1E-7 mbar | |
Ultimate Pressure | <1E-8 mbar (without any leaking ) | |
Mass Flow Gas Control | Structure | Made of 316 stainless steel valve The flow rate control range and a number of gas routes are available for customization. Please contact us for detailed information. |
Power | 23W per channel | |
Rated Voltage | AC 220V/50Hz Single phase | |
Gas routes | Please select the number of gas routes in the optional bar to update the price | |
Application Notes | In order to obtain accurate temperature inside the tube furnace, a temperature calibration is needed before use; Vacuum pressures may only be safely used up to 1500°C for alumina tubes The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure) | |
Warranty | One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacements at related products below.) | |
Shipping Dimensions | Two cases in one plastic pallet: 45x45x35/case | |
Warnings | The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.02 MPa/ 3 PSI Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages. The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) Vacuum pressures may only be safely used up to 1500°C | |
This protective coating is frequently used in aeronautics, especially on the reactors’ turbines blades which run at very high temperatures and in a very oxidizing atmosphere of CVD tube furnace.
This process is usually realized at temperatures around 1000°C and 1150°C under neutral gas like Argon, and consists in creating a sealed enclosure on which mechanical parts are placed.
CVD Chemical Vapor Deposition furnaces are either manually made or in a totally automated way to optimize cycles.
HTTF-1700-HVC CVD tube furnace is a diameter 60mm single-zone alumina tube furnace with a high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.
CVD Chemical Vapor Deposition furnace is a process which allows the creation of a deposit on the surface of mechanical parts, to protect them from oxidation and corrosion.
HTTF-1700 series tube furnace | Casing | Double-layer steel casing with air cooling. |
Processing Tube W Thermal Block Placement | Material: High Purity Alumina | |
Power | AC 208-240V Single phase, 50/60Hz | |
Heating Element | 8 pcs 1800°C grade MoSi2 heating element | |
Working Temp. | Max. Heating Temp.: 1650°C | |
Heat-up Rate | <=5°C/min | |
Heating Zone Length | Heating zone length: 457 mm (18") | |
Temp. Control | PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller. | |
Vacuum Seal | One pair of stainless steel vacuum flange with: | |
Dimension | 550 x 380 x 520 | |
High Vacuum Station | Power | 100~110W |
Rated Voltage | AC 208-240V Single Phase, 50/60Hz | |
Dimension | 600(L) x 600(W) x 700(H), mm | |
Structure | Mobile cart size: 600 (L) x 600 (W) x 700(H), mm A vacuum sensor is not included | |
Control Panel | One button operation - the diaphragm pump and the turbopump will start after pressing "start" button. System-controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber. Self-protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum. LCD screen - double lines parameters checking interface make the working easier to be handled. | |
Volume Flow Rate | Nitrogen N2 33 L/s | |
Working Range | From 1000 mbar to <1E-7 mbar | |
Ultimate Pressure | <1E-8 mbar (without any leaking ) | |
Mass Flow Gas Control | Structure | Made of 316 stainless steel valve The flow rate control range and a number of gas routes are available for customization. Please contact us for detailed information. |
Power | 23W per channel | |
Rated Voltage | AC 220V/50Hz Single phase | |
Gas routes | Please select the number of gas routes in the optional bar to update the price | |
Application Notes | In order to obtain accurate temperature inside the tube furnace, a temperature calibration is needed before use; Vacuum pressures may only be safely used up to 1500°C for alumina tubes The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure) | |
Warranty | One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacements at related products below.) | |
Shipping Dimensions | Two cases in one plastic pallet: 45x45x35/case | |
Warnings | The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.02 MPa/ 3 PSI Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages. The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) Vacuum pressures may only be safely used up to 1500°C | |
This protective coating is frequently used in aeronautics, especially on the reactors’ turbines blades which run at very high temperatures and in a very oxidizing atmosphere of CVD tube furnace.
This process is usually realized at temperatures around 1000°C and 1150°C under neutral gas like Argon, and consists in creating a sealed enclosure on which mechanical parts are placed.
CVD Chemical Vapor Deposition furnaces are either manually made or in a totally automated way to optimize cycles.
