HTBLF-1600 Atmosphere Controlled Furnace is a vertical atmosphere-controlled bottom loading furnace with a 280 dia x 300 mm H sealed chamber and automatic bottom loading mechanism. Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10-2 torr through a mechanical pump. It is designed for sintering material or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1600°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.
Features | Double-layer steel casing with water-cold vacuum-sealed chamber High-purity fibrous alumina insulation for maximum energy saving Automatic bottom loading for easy operation The automatic pressure control and protection is built-in for safe operation Programmable temperature control up to 1600ºC |
Power | Single-phase 220 VAC, 50/60Hz (20 A breaker required) 13 KW Max. |
Working Temperature | 800°C - 1600°C continuously Temperature Uniformity: +/- 0.5°C Recommended heating rate: ≤10°C/min |
Heating Elements | MoSi2 Heating Elements |
Vacuum Chamber | Effective heating chamber size: 280 mm diameter x 300 mm H ( Capacity 18 Liters） Vacuum-sealed stainless steel chamber with fibrous alumina thermal insulation layer inside A water-cooling jacket on the outside of the chamber and flange to protect the vacuum-sealing O-rings One 16L/min recirculating water chiller is included Vacuum Chamber Bottom loaded flange driven by the electric motor for easy sample load of 50 Kg max. One high-quality mechanical vacuum pump is included to achieve a 10-2 torr level. (Pic. 2) |
Control Panel | Touch screen control panel for controlling temperature and inert gas pressure. Temperature control Eurotherm Temperature Controller inside 1 program, 24 segments programmed with ramping, cooling, and dwelling steps Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection +/- 0.1 ºC temperature accuracy B-type thermal couple Furnace purging function by manual or auto mode Constant pressure control can be achieved between 100 - 115 KPa Safety pressure release valve built-in Two gas flowmeters are installed in the front panel. PC control RS485 port is built-in for PC operation Please order the laptop along with the furnace from us, we will install the software and test it before shipping. |
Overall Dimensions | 1500mm (L) x 1050mm (W) x 2040mm (H) |
Net Weight | 500 kg |
Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.) ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of One Year Limited Warranty |
HTBLF-1600 Atmosphere Controlled Furnace is a vertical atmosphere-controlled bottom loading furnace with a 280 dia x 300 mm H sealed chamber and automatic bottom loading mechanism. Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10-2 torr through a mechanical pump. It is designed for sintering material or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1600°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.
Features | Double-layer steel casing with water-cold vacuum-sealed chamber High-purity fibrous alumina insulation for maximum energy saving Automatic bottom loading for easy operation The automatic pressure control and protection is built-in for safe operation Programmable temperature control up to 1600ºC |
Power | Single-phase 220 VAC, 50/60Hz (20 A breaker required) 13 KW Max. |
Working Temperature | 800°C - 1600°C continuously Temperature Uniformity: +/- 0.5°C Recommended heating rate: ≤10°C/min |
Heating Elements | MoSi2 Heating Elements |
Vacuum Chamber | Effective heating chamber size: 280 mm diameter x 300 mm H ( Capacity 18 Liters） Vacuum-sealed stainless steel chamber with fibrous alumina thermal insulation layer inside A water-cooling jacket on the outside of the chamber and flange to protect the vacuum-sealing O-rings One 16L/min recirculating water chiller is included Vacuum Chamber Bottom loaded flange driven by the electric motor for easy sample load of 50 Kg max. One high-quality mechanical vacuum pump is included to achieve a 10-2 torr level. (Pic. 2) |
Control Panel | Touch screen control panel for controlling temperature and inert gas pressure. Temperature control Eurotherm Temperature Controller inside 1 program, 24 segments programmed with ramping, cooling, and dwelling steps Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection +/- 0.1 ºC temperature accuracy B-type thermal couple Furnace purging function by manual or auto mode Constant pressure control can be achieved between 100 - 115 KPa Safety pressure release valve built-in Two gas flowmeters are installed in the front panel. PC control RS485 port is built-in for PC operation Please order the laptop along with the furnace from us, we will install the software and test it before shipping. |
Overall Dimensions | 1500mm (L) x 1050mm (W) x 2040mm (H) |
Net Weight | 500 kg |
Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.) ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of One Year Limited Warranty |
