HT1200 Vertical Vacuum Chamber Furnace is a Vertical vacuum-sealed furnace. It equips a Quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbo pump. Vacuum crucible furnace is designed for calcining or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1100°C.

SPECIFICATIONS of Vertical Vacuum Chamber Furnace

-          Power: Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed), 3 KW max.

*Note: Power cable included but without the plug.

- Working Temperature<= 1000°C continuously

- Max. 1100°C, < 30 minutes

- Temperature Uniformity: +/- 2°C

- Furnace quartz tube is available for 1150oC working temperature at extra cost.

- Heating Rate Max. 20°C/ min

- Recommended: 10°C/ min

- Heating Elements: High-quality Ni-Cr-Al resistance wire

- Quartz Tube & Effective Heating: Tube size: 230 O.D. x 218 I.D. x 340 H, mm

- Capacity: ~ 8 liters, The quartz tube is replaceable.

-          Vacuum Flange of Vacuum crucible furnace

Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket

One 1/4 gas inlet and the outlet port are built on the top of the flange with needle valves

One bored Al2O3 foam refractory block (190Dia x 50mm) is provided

K25 port is built-in for connecting to the vacuum pump

Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa

-          Water Cooling of Vertical Vacuum Chamber Furnace

A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C.  16L/min water flow required. Please click the picture below left to order the water chiller

-          Temperature Controller of Vacuum crucible furnace

Proportional–integral–derivative control (PID control) and auto-tune function

30 segments programmed with ramping, cooling, and dwelling steps

Built-in over-temperature alarm and thermocouple failure alarm

+/- 1 ºC temperature control accuracy

THE Default DB9 PC communication port included for connecting to PC (Options)

Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy (Options)

-          Vacuum Pressure of Vacuum crucible furnace

Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:

10-2 torr via mechanical pump within 30 minutes without thermal Block

10-4 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C

Optional: The vacuum pump and pipe are not included,

-          Warranty of Vertical Vacuum Chamber Furnace

One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.). 

ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of HT One Year Limited Warranty.

Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars

Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.

A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes to undergo deformations under vacuum.

The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks