The Furnace is a single heating zone with an 8.5" quartz tube. The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built-in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with an accuracy of +/-1°C and 30 programmable segments.
SPECIFICATIONS:
| Fused quartz tube size | 216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L) |
| Furnace structure | Double-layer steel casing. Four cooling fans are built inside to keep the temperature of the outside case < 60ºC High purity alumina fibrous insulation for max energy saving. Two foam ceramic thermal blocks are included to block heat radiation Hinged type and water cold flange for loading sample easy.
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| Input voltage | 208 - 230VAC Single phase |
| power | 8kW (50Amps Air Breaker is required) |
| Heating element | NiCrAl Resistance Wire |
| Working Temperature | Max. heating temperature: 1100°C Continuous working temperature: 400 -1050°C Max. heating/cooling rate: 20°C/min Recommended heating/cooling rate: 10°C/min Max. Typical temperature profile at 800°C
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| Heating zone | Total heating zone length: 600mm (24'') constant temperature zone: 200mm within +/-1°C, and 300mm within +/-5°C |
| Temperature Controller | One Precision digital controller with PID function and 30 segments programmable A secondary temperature monitor has the function of protection from over-temperature and broken thermocouple K type thermocouple Temperature accuracy: +/-1°C
Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 300 Temperature Controller with +/-0.1ºC accuracy. This package includes a communication cable (RS485 - USB), and a software CD.
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| Vacuum & Fitting Ports | One pair of hinged type stainless steel vacuum seal flange with water cooling One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF40 vacuum port, and 1/4'' feedthrough. Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump)
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| Water Chiller (Optional) | Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system to save water.
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| Product dimension | 1000L x 680W x 920 H, mm |
| Net weight | 250Kg |
| Shipping dimension | 350Kg |
| Warranty | One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
| Compliance | |
| Application Notes | Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum pressures may only be safely used up to 1000°C The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube. Please use the manual torque wrench to tighten all flange screws to avoid overpressure incidents. The recommended torque is 45 inch-lbs at max.
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The Furnace is a single heating zone with an 8.5" quartz tube. The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built-in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with an accuracy of +/-1°C and 30 programmable segments.
SPECIFICATIONS:
| Fused quartz tube size | 216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L) |
| Furnace structure | Double-layer steel casing. Four cooling fans are built inside to keep the temperature of the outside case < 60ºC High purity alumina fibrous insulation for max energy saving. Two foam ceramic thermal blocks are included to block heat radiation Hinged type and water cold flange for loading sample easy.
|
| Input voltage | 208 - 230VAC Single phase |
| power | 8kW (50Amps Air Breaker is required) |
| Heating element | NiCrAl Resistance Wire |
| Working Temperature | Max. heating temperature: 1100°C Continuous working temperature: 400 -1050°C Max. heating/cooling rate: 20°C/min Recommended heating/cooling rate: 10°C/min Max. Typical temperature profile at 800°C
|
| Heating zone | Total heating zone length: 600mm (24'') constant temperature zone: 200mm within +/-1°C, and 300mm within +/-5°C |
| Temperature Controller | One Precision digital controller with PID function and 30 segments programmable A secondary temperature monitor has the function of protection from over-temperature and broken thermocouple K type thermocouple Temperature accuracy: +/-1°C
Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 300 Temperature Controller with +/-0.1ºC accuracy. This package includes a communication cable (RS485 - USB), and a software CD.
|
| Vacuum & Fitting Ports | One pair of hinged type stainless steel vacuum seal flange with water cooling One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF40 vacuum port, and 1/4'' feedthrough. Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump)
|
| Water Chiller (Optional) | Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system to save water.
|
| Product dimension | 1000L x 680W x 920 H, mm |
| Net weight | 250Kg |
| Shipping dimension | 350Kg |
| Warranty | One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
| Compliance | |
| Application Notes | Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum pressures may only be safely used up to 1000°C The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube. Please use the manual torque wrench to tighten all flange screws to avoid overpressure incidents. The recommended torque is 45 inch-lbs at max.
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