The Furnace is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace.
| Power | Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (20 A breaker installed) 3 KW max. Note： Power cable included but without the plug. Please install a plug on your own
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| Working Temperature | <= 1000 °C continuously
Max. 1100 °C, < 30 minutes Temperature Uniformity: +/- 2°C Note: <= 1150 °C continuously is available upon request by GE214 grade quartz tube at the extra cost
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Heating Rate | Max. 20°C/ min Recommended. 10°C/ min |
| Heating Elements | High-quality Ni-Cr-Al resistance wire |
| Quartz Tube & Effective Heating | Tube size: 8" O.D. x 7.5" I.D. x 13.4" L.
Heating Zone (Inside Quartz Tube): 7.5" ID x 8.5" Depth (7.6Liter)
Uniform Temperature zone: 6"Dia x 3.5" depth in center position within +/- 5ºC
The quartz tube is replaceable
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| Vacuum Flange | Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes. Gas inlet/outlet near the sample surface. (Fig. A, B, C) Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L Electric feedthrough. eg. Four probe resistance measurements (Fig. D) One bored Al2O3 foam refractory block (190Dia * 50mm) is provided. (Fig. F) Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request (Since Apr 2016) Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
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| Gas Inlet and Outlet & Water cooling | One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace The inert gas can be introduced into the chamber via the inlet for purging purposes. If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below. A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). A water chiller is required for heating temperatures above 500°C (thermal block is placed)
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| Temperature Controller | NRTL-certified digital temperature controller is included. Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling, and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy ThE Default DB9 PC communication port is included for connecting to a PC Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy.
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| Options | Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate |
| Options | The sample holder is not included in the furnace. You may order quartz wafer boat to anneal wafer up to 6" Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block. A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
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| Vacuum Pressure | Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, HT's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below: 10-2 torr via mechanical pump within 30 minutes 10-4 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C Optional: The vacuum pump and pipe are not included For achieving a higher vacuum level, a Turbopump is necessary. Spare sealing O-ring is available at extra cost KF25 Right-Angle Valve for quick connection to KF25 Bellows
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| Overall Dimensions | 700mm(L) x 440mm(W) x 435mm(H) |
| Net Weight | 80 kg |
| Shipping Weight | 47"(L) x39"(W) x47"(H) |
Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.) |
| Compliance | CE Certified NRTL or CSA certification is available upon request at extra cost.
|
| Warning | Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. Max. 1000°C is limited on all quartz tube furnaces under vacuum to avoid the quartz tube's deformation. The flow rate for gasses should be limited to < 200 SCCM to reduce thermal shocks
|
The Furnace is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace.
| Power | Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (20 A breaker installed) 3 KW max. Note： Power cable included but without the plug. Please install a plug on your own
|
| Working Temperature | <= 1000 °C continuously
Max. 1100 °C, < 30 minutes Temperature Uniformity: +/- 2°C Note: <= 1150 °C continuously is available upon request by GE214 grade quartz tube at the extra cost
|
Heating Rate | Max. 20°C/ min Recommended. 10°C/ min |
| Heating Elements | High-quality Ni-Cr-Al resistance wire |
| Quartz Tube & Effective Heating | Tube size: 8" O.D. x 7.5" I.D. x 13.4" L.
Heating Zone (Inside Quartz Tube): 7.5" ID x 8.5" Depth (7.6Liter)
Uniform Temperature zone: 6"Dia x 3.5" depth in center position within +/- 5ºC
The quartz tube is replaceable
|
| Vacuum Flange | Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes. Gas inlet/outlet near the sample surface. (Fig. A, B, C) Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L Electric feedthrough. eg. Four probe resistance measurements (Fig. D) One bored Al2O3 foam refractory block (190Dia * 50mm) is provided. (Fig. F) Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request (Since Apr 2016) Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
|
| Gas Inlet and Outlet & Water cooling | One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace The inert gas can be introduced into the chamber via the inlet for purging purposes. If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below. A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). A water chiller is required for heating temperatures above 500°C (thermal block is placed)
|
| Temperature Controller | NRTL-certified digital temperature controller is included. Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling, and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy ThE Default DB9 PC communication port is included for connecting to a PC Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy.
|
| Options | Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate |
| Options | The sample holder is not included in the furnace. You may order quartz wafer boat to anneal wafer up to 6" Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block. A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
|
| Vacuum Pressure | Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, HT's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below: 10-2 torr via mechanical pump within 30 minutes 10-4 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C Optional: The vacuum pump and pipe are not included For achieving a higher vacuum level, a Turbopump is necessary. Spare sealing O-ring is available at extra cost KF25 Right-Angle Valve for quick connection to KF25 Bellows
|
| Overall Dimensions | 700mm(L) x 440mm(W) x 435mm(H) |
| Net Weight | 80 kg |
| Shipping Weight | 47"(L) x39"(W) x47"(H) |
Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.) |
| Compliance | CE Certified NRTL or CSA certification is available upon request at extra cost.
|
| Warning | Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. Max. 1000°C is limited on all quartz tube furnaces under vacuum to avoid the quartz tube's deformation. The flow rate for gasses should be limited to < 200 SCCM to reduce thermal shocks
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