The furnace is a 6" ( 150 mm) dia. solid tube furnace with 3 heating zone and a 1200oC working temperature。 The tube furnace equips with a touch screen control system, that allows a one-click start/stop multi-temperature zone, the automatic recording. The temperature profile can pre-store up to 5 programs. The furnace can accept quartz tubes with the optional diameter f 80, 100, 130, and 150mm. Vaccum-sealed stainless steel sealing flanges is available as an option for the heat treatment of sample under a controlled atmosphere
SPECIFICATIONS:
| Furnace Structure | Touch screen control with one-click start/stop multi-temperature zone Automatic record (stored for 1 month) Preset temperature curve function Energy-saving high-purity Al2O3 fibrous insulation liner with an aluminum oxide coating Extended lifespan Solid tube insulation provides a more uniform temperature zone
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| Power | AC220V 50/60HZ, single phase 12kW Power cable is included without plug ( The plug may be available upon request )
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| Working Temperature | Max. Temperature: 1200 °C (< 30 min) Continuous working temperature: 1100 °C Max. Heating Rate: 10°C /min
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| Heating Zone | ZONE 1: 152.5mm（6”） Spacing: 40mm ZONE 2:315mm(12.4”) Spacing: 40mm ZONE 3: 152.5mm（6”）
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| Temperature Controller | 7" touch screen control panel PID automatic control and auto-tune function. 50 programmable segments for the precise process Built-in protection for overheated and broken Thermal couple Temperature Accuracy: +/- 0.2 °C K-type thermal couple Slope or Time mode for the temperature curve function Optional Computer Software(controlling TEMP curve and exporting data) at extra cost
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Temperature Calibrator Kit (Optional at extra cost) | |
Processing Tube & Tube Adapter, and vacuum-sealed flange (Sold Separately)
| Quartz Tube 100 O.D x 95 I.D x 1200 L (mm) 130 O.D x 124 I.D x 1200 L (mm) 150 O.D x 144 I.D x 1200 L (mm) ---- 4" wafer annealing Fibrous ceramic tube blocks can block heat radiation generated from the tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating). Quartz blocks (optional) are ideal for cleaner processing and higher vacuum efficiency.
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Vacuum Pressure (Sold Separately) | 50 m-torr can be achieved by a mechanical pump 10^-5 torr and 10-6 torr can be reached by turbopump |
| Dimensions | 1620(L)*550(W)*730(H) mm |
| Weight | ~ 136kg |
| Warranty | One-year limited warranty with lifetime support. |
| Application Notes | Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. The vacuum limit for all quartz tube furnaces is < 1000oC. The flow rate for gases should be limited to< 200ml/min)for reducing thermal shocks to the tube How to set up a ceramic tube and vacuum flange for tube furnaces.
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| WARNING | If the end-user has to close the valve to heat the sample, ALWAYS pay attention to the pressure gauge indicator. BE SURE the pressure is lower than 0.02 MPA(use a relief valve) to prevent accidents. The end user is responsible for taking the relevant protection and explosion-proof measures, and all the consequences when processing any flammable, explosive, or toxic gases. The equipment must work under the independent power supply network, and the voltage range of the power supply network should be within ± 8% DON'T share the power supply with the equipment of high magnetic fields such as intermediate frequency and high frequency, stay away from the equipment of intermediate frequency, and prevent the space electromagnetic radiation Keep away from liquid spatter Keep away from conductive powder
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The furnace is a 6" ( 150 mm) dia. solid tube furnace with 3 heating zone and a 1200oC working temperature。 The tube furnace equips with a touch screen control system, that allows a one-click start/stop multi-temperature zone, the automatic recording. The temperature profile can pre-store up to 5 programs. The furnace can accept quartz tubes with the optional diameter f 80, 100, 130, and 150mm. Vaccum-sealed stainless steel sealing flanges is available as an option for the heat treatment of sample under a controlled atmosphere
SPECIFICATIONS:
| Furnace Structure | Touch screen control with one-click start/stop multi-temperature zone Automatic record (stored for 1 month) Preset temperature curve function Energy-saving high-purity Al2O3 fibrous insulation liner with an aluminum oxide coating Extended lifespan Solid tube insulation provides a more uniform temperature zone
|
| Power | AC220V 50/60HZ, single phase 12kW Power cable is included without plug ( The plug may be available upon request )
|
| Working Temperature | Max. Temperature: 1200 °C (< 30 min) Continuous working temperature: 1100 °C Max. Heating Rate: 10°C /min
|
| Heating Zone | ZONE 1: 152.5mm（6”） Spacing: 40mm ZONE 2:315mm(12.4”) Spacing: 40mm ZONE 3: 152.5mm（6”）
|
| Temperature Controller | 7" touch screen control panel PID automatic control and auto-tune function. 50 programmable segments for the precise process Built-in protection for overheated and broken Thermal couple Temperature Accuracy: +/- 0.2 °C K-type thermal couple Slope or Time mode for the temperature curve function Optional Computer Software(controlling TEMP curve and exporting data) at extra cost
|
Temperature Calibrator Kit (Optional at extra cost) | |
Processing Tube & Tube Adapter, and vacuum-sealed flange (Sold Separately)
| Quartz Tube 100 O.D x 95 I.D x 1200 L (mm) 130 O.D x 124 I.D x 1200 L (mm) 150 O.D x 144 I.D x 1200 L (mm) ---- 4" wafer annealing Fibrous ceramic tube blocks can block heat radiation generated from the tube center. (Ceramic blocks must be fully inserted into the furnace chamber before heating). Quartz blocks (optional) are ideal for cleaner processing and higher vacuum efficiency.
|
Vacuum Pressure (Sold Separately) | 50 m-torr can be achieved by a mechanical pump 10^-5 torr and 10-6 torr can be reached by turbopump |
| Dimensions | 1620(L)*550(W)*730(H) mm |
| Weight | ~ 136kg |
| Warranty | One-year limited warranty with lifetime support. |
| Application Notes | Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. The vacuum limit for all quartz tube furnaces is < 1000oC. The flow rate for gases should be limited to< 200ml/min)for reducing thermal shocks to the tube How to set up a ceramic tube and vacuum flange for tube furnaces.
|
| WARNING | If the end-user has to close the valve to heat the sample, ALWAYS pay attention to the pressure gauge indicator. BE SURE the pressure is lower than 0.02 MPA(use a relief valve) to prevent accidents. The end user is responsible for taking the relevant protection and explosion-proof measures, and all the consequences when processing any flammable, explosive, or toxic gases. The equipment must work under the independent power supply network, and the voltage range of the power supply network should be within ± 8% DON'T share the power supply with the equipment of high magnetic fields such as intermediate frequency and high frequency, stay away from the equipment of intermediate frequency, and prevent the space electromagnetic radiation Keep away from liquid spatter Keep away from conductive powder
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