ZHENGZHOU HENGTONG FURNACE CO,. LTD
Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD
  • Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD
  • Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD
0 1

Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD

LVD-F1 is a precision & cost-effective liquid evaporating delivery system for lab scale CVD or DLCVD, which can carry all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2, etc. Liquid Vaporization Systems with Temperature and Pressure Control is an ideal tool for the CVD processing of nanowire and film together with electric furnace system in material research.

LVD-F1 is a precision & cost-effective liquid evaporating delivery system for lab scale CVD or DLCVD, which can carry all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2, etc., without worrying about corrosion. Liquid Vaporization Systems with Temperature and Pressure Control is an ideal tool for the CVD processing of nanowire and film together with electric furnace system in material research.

 

Product Structure

Stainless steel

Power Input

220V 50Hz

2200 W Power consumption

110V is available with a transformer

Liquid Flow Control

Precision digital control with +/- 0.5% FS accuracy

Flow rate arrange: 0 - 10 ml/minute adjustable (min. rate: 0.1 ml/min)

The liquid can be soaked from a container automatically.

Heater Temperature controller

Liquid and carrying gas go through an SS316 coil, which is heated by a built-in small furnace up to 550ºC

One heating tube is included to prevent output vapor from condensing on tube or flange (max. temperature 200ºC). The heating tube could be generated as secondary heating to prevent the liquid or gas cool down while passing through the tube.

Single Set point temperature controller (not programmable)

Gas flow control

Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL/min adjustable). The optional digital mass flow controller is available at extra cost.

Pressure gauge built in front panel

Two SS needle valves are installed to control gas in and out

Vapor Gas outlet tube fitting size:  1/4"OD

Note: 1/4'' PTFE tube, 1/4'' SS tube, and beaker are not included, customers need to prepare them according to the experimental needs.

The inert gas tank is required to deliver vapor 

Application Note

This system can fit with all MTI tube furnaces and CVD furnaces, click the picture below to see how, and choose a furnace at " CVD Furnace System" 

Dimension & Weight

Heater & Gas Control Unit:   390L x 420W x 360H, mm

Total height with the tube supporting stand: 750mm

Net weight:  18 Kg

Warranty

One year limited and extended warranty available upon request


LVD-F1 is a precision & cost-effective liquid evaporating delivery system for lab scale CVD or DLCVD, which can carry all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2, etc., without worrying about corrosion. Liquid Vaporization Systems with Temperature and Pressure Control is an ideal tool for the CVD processing of nanowire and film together with electric furnace system in material research.

 

Product Structure

Stainless steel

Power Input

220V 50Hz

2200 W Power consumption

110V is available with a transformer

Liquid Flow Control

Precision digital control with +/- 0.5% FS accuracy

Flow rate arrange: 0 - 10 ml/minute adjustable (min. rate: 0.1 ml/min)

The liquid can be soaked from a container automatically.

Heater Temperature controller

Liquid and carrying gas go through an SS316 coil, which is heated by a built-in small furnace up to 550ºC

One heating tube is included to prevent output vapor from condensing on tube or flange (max. temperature 200ºC). The heating tube could be generated as secondary heating to prevent the liquid or gas cool down while passing through the tube.

Single Set point temperature controller (not programmable)

Gas flow control

Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL/min adjustable). The optional digital mass flow controller is available at extra cost.

Pressure gauge built in front panel

Two SS needle valves are installed to control gas in and out

Vapor Gas outlet tube fitting size:  1/4"OD

Note: 1/4'' PTFE tube, 1/4'' SS tube, and beaker are not included, customers need to prepare them according to the experimental needs.

The inert gas tank is required to deliver vapor 

Application Note

This system can fit with all MTI tube furnaces and CVD furnaces, click the picture below to see how, and choose a furnace at " CVD Furnace System" 

Dimension & Weight

Heater & Gas Control Unit:   390L x 420W x 360H, mm

Total height with the tube supporting stand: 750mm

Net weight:  18 Kg

Warranty

One year limited and extended warranty available upon request