PECVD Split Tube Furnace with 4 Channels Gas Delivery is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) laboratory vacuum tube furnace system, The PECVD tube furnace is an ideal and affordable tool (laboratory tube furnace) to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits.
HTTF-1200-PE PECVD Split Tube Furnace with 4 Channels Gas Delivery is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) laboratory vacuum tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PECVD furnace is an ideal and affordable tool (laboratory tube furnace) to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:
Lower temperature processing compared to conventional CVD high temperature vacuum tube furnace.
Film stress can be controlled by high/low frequency mixing techniques.
Control over stoichiometry via process conditions.
Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
STANDARD SPECIFICATION of PECVD Split Tube Furnace
Split Tube furnace | 1200oC Max. working temperature for < 60 minutes 1100oC Max for continuous heating 30 segments programmable precision digital temperature controller 440 mm length single heating zone and 150 mm length constant temperate zone High purity quartz tube optional from ( click optional bar to choose ) One pair of vacuum sealed flange with valves 2"OD x 1.7"ID x 48" Length 3.14"OD x 2.83"ID x 48'' Length Input power: 208 – 240V AC input, single phase at max. 4KW |
Plasma RF Power Supply of high temperature furnace | Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, 50/60Hz Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
Anti-corrosive Pressure Gauge of PECVD Split tube furnace | 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element |
Vacuum Pump and valve of high temperature furnace | Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve Digital vacuum pressure gauge and display are installed with the furnace Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs. |
Mass Flowmeter of CVD tube furnace | 4-Channelled Gas Mixing Made of 316 stainless steel valve Gas mixing tank: Φ80X120mm 600mm(L) x 745mm(W) x 700mm(H) 6" color touch screen control panel to make parameter setting at easy. Touchscreen Control and PC remote switchable. 23W per channel AC 220V/50Hz Single phase |
Temperature Controller of PECVD Laboratory tube furnace | 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection for laboratory tube furnace. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy of vacuum tube furnace. RS485 Communications Port. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller. |
Warning of split tube furnace | The PECVD Split tube furnace with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube HT reserves right to modify PECVD design at any time without notice but promise that quality will meet the specifications above |
Warranty of PECVD tube furnace | One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
HTTF-1200-PE PECVD Split Tube Furnace with 4 Channels Gas Delivery is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) laboratory vacuum tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PECVD furnace is an ideal and affordable tool (laboratory tube furnace) to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:
Lower temperature processing compared to conventional CVD high temperature vacuum tube furnace.
Film stress can be controlled by high/low frequency mixing techniques.
Control over stoichiometry via process conditions.
Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
STANDARD SPECIFICATION of PECVD Split Tube Furnace
Split Tube furnace | 1200oC Max. working temperature for < 60 minutes 1100oC Max for continuous heating 30 segments programmable precision digital temperature controller 440 mm length single heating zone and 150 mm length constant temperate zone High purity quartz tube optional from ( click optional bar to choose ) One pair of vacuum sealed flange with valves 2"OD x 1.7"ID x 48" Length 3.14"OD x 2.83"ID x 48'' Length Input power: 208 – 240V AC input, single phase at max. 4KW |
Plasma RF Power Supply of high temperature furnace | Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, 50/60Hz Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
Anti-corrosive Pressure Gauge of PECVD Split tube furnace | 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element |
Vacuum Pump and valve of high temperature furnace | Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve Digital vacuum pressure gauge and display are installed with the furnace Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs. |
Mass Flowmeter of CVD tube furnace | 4-Channelled Gas Mixing Made of 316 stainless steel valve Gas mixing tank: Φ80X120mm 600mm(L) x 745mm(W) x 700mm(H) 6" color touch screen control panel to make parameter setting at easy. Touchscreen Control and PC remote switchable. 23W per channel AC 220V/50Hz Single phase |
Temperature Controller of PECVD Laboratory tube furnace | 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection for laboratory tube furnace. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy of vacuum tube furnace. RS485 Communications Port. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller. |
Warning of split tube furnace | The PECVD Split tube furnace with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube HT reserves right to modify PECVD design at any time without notice but promise that quality will meet the specifications above |
Warranty of PECVD tube furnace | One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
