The designing and processing of Fluidized Bed CVD (FBCVD) Furnace

The designing and processing of Fluidized Bed CVD (FBCVD) Furnace is for Powder CVD ( FBCVD) applications, and a special Fluidized Bed vacuum Vertical tube Furnace. It consists of a vertical positioned cylindrical heating chamber that surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow passes through and floats the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials takes place.

Here is the detail drawing of application of Fluidized bed cvd tube furnace.