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Email:ht@ovenfurnace.com

The designing and processing of Fluidized Bed CVD (FBCVD) Furnace is for Powder CVD ( FBCVD) applications, and a special Fluidized Bed vacuum Vertical tube Furnace. It consists of a vertical positioned cylindrical heating chamber that surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow passes through and floats the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials takes place.
Here is the detail drawing of application of Fluidized bed cvd tube furnace.



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