The Furnace is a Vertical vacuum-sealed furnace.It equips an Ø200×Ø190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.
SPECIFICATIONS
| Power | Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed) 3 KW max. Note: Power cable included but without the plug. Please install a plug by your own |
| Working Temperature | <1100°C under ambient pressure <1000°C under vacuum GE214 quartz tube is available for 1150oC working temperature at extra cost. |
| Heating Rate | <20°C/ min Recommended: 10°C/ min |
| Heating Elements | Ni-Cr-Al resistance wire |
| Quartz Tube & Effective Heating | Tube size: Ø200×Ø190×H425 mm Max. loading 40Kg Heating area Ø240×H245 mm |
| Vacuum Flange | Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket One 1/4 gas inlet and one gas outlet with needle valves. One bored Al2O3 foam refractory block (190Dia x 50mm) is provided K25 port is built-in for connecting to the vacuum pump Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa |
| Water Cooling | A water-cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C. 16L/min water flow required. |
| Temperature Controller | NRTL certified digital temperature controller is included Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling, and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy THE Default DB9 PC communication port included for connecting to PC Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy |
| Options | Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate The furnace can be modified into a faster heating and cooling furnace |
| Vacuum Pressure | Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, HT's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below: 10-2 torr via mechanical pump within 30 minutes without thermal Block 10-5 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C |
| Options | You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate |
| Overall Dimensions | 500×530×880 mm |
| Net Weight | 70 kg |
| Shipping Weight | 45"(L) x 28"(W) x 35"(H) |
| Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.). ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of HT One Year Limited Warranty. |
| Compliance | CE Certified NRTL or CSA certification is available upon request at extra cost. |
| Warning | Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum. The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks |
The Furnace is a Vertical vacuum-sealed furnace.It equips an Ø200×Ø190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.
SPECIFICATIONS
| Power | Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed) 3 KW max. Note: Power cable included but without the plug. Please install a plug by your own |
| Working Temperature | <1100°C under ambient pressure <1000°C under vacuum GE214 quartz tube is available for 1150oC working temperature at extra cost. |
| Heating Rate | <20°C/ min Recommended: 10°C/ min |
| Heating Elements | Ni-Cr-Al resistance wire |
| Quartz Tube & Effective Heating | Tube size: Ø200×Ø190×H425 mm Max. loading 40Kg Heating area Ø240×H245 mm |
| Vacuum Flange | Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket One 1/4 gas inlet and one gas outlet with needle valves. One bored Al2O3 foam refractory block (190Dia x 50mm) is provided K25 port is built-in for connecting to the vacuum pump Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa |
| Water Cooling | A water-cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C. 16L/min water flow required. |
| Temperature Controller | NRTL certified digital temperature controller is included Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling, and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy THE Default DB9 PC communication port included for connecting to PC Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy |
| Options | Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate The furnace can be modified into a faster heating and cooling furnace |
| Vacuum Pressure | Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, HT's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below: 10-2 torr via mechanical pump within 30 minutes without thermal Block 10-5 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C |
| Options | You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate |
| Overall Dimensions | 500×530×880 mm |
| Net Weight | 70 kg |
| Shipping Weight | 45"(L) x 28"(W) x 35"(H) |
| Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.). ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of HT One Year Limited Warranty. |
| Compliance | CE Certified NRTL or CSA certification is available upon request at extra cost. |
| Warning | Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum. The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks |
