• <= 1000 °C continuously

  
  

• Max. 1100 °C, < 30 minutes

• Temperature Uniformity: +/- 2°C

• Note: <= 1150 °C continuously is available upon request by GE214 grade quartz tube at the extra cost

Heating Rate

Max. 20°C/ min

Recommended. 10°C/ min

• Tube size: 8" O.D. x 7.5" I.D. x 13.4" L. 

  
  

• Heating Zone (Inside Quartz Tube): 7.5" ID x 8.5" Depth (7.6Liter)

  
  

• Uniform Temperature zone:  6"Dia x 3.5" depth in center position within +/- 5ºC

  
  

• The quartz tube is replaceable 

• Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. 

• Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes.

• Gas inlet/outlet near the sample surface. (Fig. A, B, C)

• Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L 

• Electric feedthrough. eg. Four probe resistance measurements (Fig. D)

• One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)

• Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request    (Since Apr 2016)

• Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.

• One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace 

• The inert gas can be introduced into the chamber via the inlet for purging purposes. 

• If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.

• A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). 

• A water chiller is required for heating temperatures above 500°C (thermal block is placed)

• NRTL-certified digital temperature controller is included.

• Proportional–integral–derivative control (PID control) and auto-tune function

• 30 segments programmed with ramping, cooling, and dwelling steps

• Built-in over-temperature alarm and thermocouple failure alarm

• +/- 1 ºC temperature control accuracy

• ThE Default DB9 PC communication port is included for connecting to a PC

• Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy.

Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. 

You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate

• The sample holder is not included in the furnace. 

• You may order quartz wafer boat to anneal wafer up to 6"

• Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.

• A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.

• Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, HT's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:

• 10-2 torr via mechanical pump within 30 minutes

• 10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C

• Optional: 

• The vacuum pump and pipe are not included

• For achieving a higher vacuum level, a Turbopump is necessary. 

• Spare sealing O-ring is available at extra cost 

•  KF25 Right-Angle Valve for quick connection to KF25 Bellows

CE Certified

NRTL or CSA certification is available upon request at extra cost.

• Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars 

• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

• Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. 

• Max. 1000°C is limited on all quartz tube furnaces under vacuum to avoid the quartz tube's deformation.

• The flow rate for gasses should be limited to < 200 SCCM to reduce thermal shocks