ZHENGZHOU HENGTONG FURNACE CO,. LTD
IR-Heating RTP Tube Furnace with Sliding Sample Holders
  • IR-Heating RTP Tube Furnace with Sliding Sample Holders
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IR-Heating RTP Tube Furnace with Sliding Sample Holders

HTTF-1200-IR RTP Tube Furnace is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. The electric furnace is capable of achieving a maximum heating rate of 50 °C/s and a cooling rate of 117 °C/min. The slide tube furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition

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  • Product Details
  • HTTF-1200-IR RTP Tube Furnace is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. The electric furnace is capable of achieving a maximum heating rate of 50 °C/s and a cooling rate of 117 °C/min. The slide tube furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition (HPCVD), where one heating zone is used as a solid evaporating source and another zone is for vapor deposition. The precision temperature controllers are able to set up programmable heating and cooling profiles with up to 30 temperature segments.

     

    Furnace Features

    Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.

    Heated by shortwave IR tube lamps for fast heating

    Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD

    Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions. 

    A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional)

    Power

    AC 208-240V, single-phase, 50/60 Hz

    MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).

    Heating Element

    16 pcs 1.5 kW halogen heating tubes, (OD = 13.3 mm, L= 390 mm)

    Standard working life: 2000 hrs.  (depends on the heating rate)

    The halogen light tube is consumable.  Please click the picture left to order spare.

    Max. Temperature

    900°C max (< 10 minutes)

    800°C (< 30 minutes)

    600°C (continuous operation)

    Temperature Accuracy

    ± 1°C

    Max. Heating Rate

    RT ~ 800ºC: 50 ºC/s

    800 ºC ~ 900 ºC: 10 ºC/s

    Max. Cooling Rate

    60 ºC/min under 200 mTorr environment

    117 ºC/min under atmospheric pressure

    10 °C/min slowest

    Process Tube Size

    High purity fused quartz tube

    Φ110 (OD) × Φ106 (ID)× 740 (L) mm

    Sliding Rails 

    Dual sliding rails made of Cr plated steel

    Sliding rail length: 400 mm

    Thermocouple

    Two K type, 1/4" Dia x 24" length   

    Temperature Controller

    Two temperature controllers for controlling two zones independently via SCR

    PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

    Built-in thermocouple broken protection.

    Over-temperature protection and alarm allow for operation without attendant(s).

    ± 1 ºC temperature accuracy for dwelling.

    RS485 Communications Port.

    PC Control:  

    A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.

    Vacuum Flanges

    SS water-cooled flanges on both sides. 

    Left flange:
                       1/4" thermocouple feedthrough
                       1/4'' tube fitting

    Right flange:
                       KF 25 port with a right angle gate valve for vacuum pump
                       Needle valve with barb fitting as a venting port

    A digital vacuum gauge is included

    Retractable bellow design is optional on the left flange, which allows sample flash heating or retrieving for fast cooling under inert gas. 

    Vacuum Level 

     Limited by the vacuum pump

    10^-2 torr can be achieved by the mechanical pump

    10^-4 torr can be reached by molecular pump

    The pump is not included.

    Water Chiller  (optional)

    Cooling water is required for the flange set.

    Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.

    Dimensions

    1300mm×600mm×810mm

    Net Weight

    ~180 Kg

    Shipping Weight

    500 lbs

    Warranty

    One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software & WiFi Control (Optional)

    Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.

    Labview Based Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

    A wireless remote control provides up to 300 meters of operating range.

    The features above are available upon request at an extra cost (up to $1,000). Please contact us for more information.

    Note:  The software is only compatible with Yudian Temperature Controller

    Application Notes

    Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).

    Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

     The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

    Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

    Quartz tubes should be replaced after every 10th use to ensure the best performance. 

    Samples should never be placed on the tube directly; please order crucibles and boats from us.

    After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications.

     


    HTTF-1200-IR RTP Tube Furnace is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. The electric furnace is capable of achieving a maximum heating rate of 50 °C/s and a cooling rate of 117 °C/min. The slide tube furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition (HPCVD), where one heating zone is used as a solid evaporating source and another zone is for vapor deposition. The precision temperature controllers are able to set up programmable heating and cooling profiles with up to 30 temperature segments.

     

    Furnace Features

    Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.

    Heated by shortwave IR tube lamps for fast heating

    Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD

    Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions. 

    A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional)

    Power

    AC 208-240V, single-phase, 50/60 Hz

    MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).

    Heating Element

    16 pcs 1.5 kW halogen heating tubes, (OD = 13.3 mm, L= 390 mm)

    Standard working life: 2000 hrs.  (depends on the heating rate)

    The halogen light tube is consumable.  Please click the picture left to order spare.

    Max. Temperature

    900°C max (< 10 minutes)

    800°C (< 30 minutes)

    600°C (continuous operation)

    Temperature Accuracy

    ± 1°C

    Max. Heating Rate

    RT ~ 800ºC: 50 ºC/s

    800 ºC ~ 900 ºC: 10 ºC/s

    Max. Cooling Rate

    60 ºC/min under 200 mTorr environment

    117 ºC/min under atmospheric pressure

    10 °C/min slowest

    Process Tube Size

    High purity fused quartz tube

    Φ110 (OD) × Φ106 (ID)× 740 (L) mm

    Sliding Rails 

    Dual sliding rails made of Cr plated steel

    Sliding rail length: 400 mm

    Thermocouple

    Two K type, 1/4" Dia x 24" length   

    Temperature Controller

    Two temperature controllers for controlling two zones independently via SCR

    PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

    Built-in thermocouple broken protection.

    Over-temperature protection and alarm allow for operation without attendant(s).

    ± 1 ºC temperature accuracy for dwelling.

    RS485 Communications Port.

    PC Control:  

    A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.

    Vacuum Flanges

    SS water-cooled flanges on both sides. 

    Left flange:
                       1/4" thermocouple feedthrough
                       1/4'' tube fitting

    Right flange:
                       KF 25 port with a right angle gate valve for vacuum pump
                       Needle valve with barb fitting as a venting port

    A digital vacuum gauge is included

    Retractable bellow design is optional on the left flange, which allows sample flash heating or retrieving for fast cooling under inert gas. 

    Vacuum Level 

     Limited by the vacuum pump

    10^-2 torr can be achieved by the mechanical pump

    10^-4 torr can be reached by molecular pump

    The pump is not included.

    Water Chiller  (optional)

    Cooling water is required for the flange set.

    Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.

    Dimensions

    1300mm×600mm×810mm

    Net Weight

    ~180 Kg

    Shipping Weight

    500 lbs

    Warranty

    One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software & WiFi Control (Optional)

    Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.

    Labview Based Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

    A wireless remote control provides up to 300 meters of operating range.

    The features above are available upon request at an extra cost (up to $1,000). Please contact us for more information.

    Note:  The software is only compatible with Yudian Temperature Controller

    Application Notes

    Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).

    Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

     The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

    Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

    Quartz tubes should be replaced after every 10th use to ensure the best performance. 

    Samples should never be placed on the tube directly; please order crucibles and boats from us.

    After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications.